Kalrez® 8575 perfluoroelastomer parts are a white product for oxidation, diffusion, lamp anneal and RTP sealing applications. Kalrez® 8575 exhibits excellent thermal stability and long-term sealing performance, less Infrared (IR) absorption and significantly reduced outgassing properties at elevated temperatures. It also has good mechanical properties and is well-suited for both static and low stress/low sealing force applications. A maximum application temperature of 300°C (572°F) is suggested. Ultrapure post-cleaning and packaging is standard for all 8575 parts._x005F
Polymer Name: Perfluoroelastomer (FFKM)
Physical Form: Seals, O-rings, Valve Seats
Features: Good Elastic Recovery, Low Outgassing, Good Mechanical Properties, Long Seal Life, Low Compression Set, Good Thermal Stability, Less Infrared Absorption
End Uses: Valve Parts, Semiconductor Applications, Valves
Color: White
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Identification & Functionality
Chemical Family
Polymer Name
Technologies
Product Families
Kalrez® 8575 Features & Benefits
Product Highlights
• White color reduces IR absorption and reduces seal temperature
• Very low outgassing properties
• Excellent (low) compression set properties
• Excellent elastic recovery properties
Applications & Uses
Markets
Applications
Plastics & Elastomers End Uses
Use Recommendations
• Chamber lids
• Gas inlets
• Quartz windows
• Throttle valves
• Other plasma applications
Properties
Color
Physical Form
Mechanical Properties
| Value | Units | Test Method / Conditions | |
| Modulus (at 100% Elongation) | 3 | MPa | ASTM D 412 |
| Tensile Strength | 14.6 | MPa | ASTM D 412 |
| Elongation (at Break) | 220 | % | ASTM D 412 |
| Hardness (Shore A) | 63 | - | ASTM D 2240 |
| Compression Set (Pellet Type 1, at 204°C, 70h) | 23 | % | ASTM D 395B |
| Compression Set (O-Ring AS568-214, at 204°C, 70h) | 17 | % | ASTM D 1414 |
Typical Properties
| Value | Units | Test Method / Conditions | |
| Maximum Service Temperature ¹ | 300 | °C | - |
Thermal Properties
| Value | Units | Test Method / Conditions | |
| Coefficient of Linear Thermal Expansion | 2.85 | E-4/°C | ISO 11359-1/-2 |
| Retraction Temperature (TR-10) | -3 | °C | ASTM D 1329 |
Other Properties
| Value | Units | Test Method / Conditions | |
| Density | 2.26 | g/cm³ | ISO 1183 |
Note
- [1]: DuPont proprietary test method; useful temperature range may vary with seal design and application specifics
Technical Details & Test Data
Seal force Retention/Compression Set
IR Absorption vs Seal Temperature
In RTP processes, IR light is used to heat the wafer. The amount of IR light absorbed by the seal is influenced by color. White seals like Kalrez® 8575 will absorb less IR light than black seals. As a result, the effects of thermal aging on white seals will be reduced throughout the life of the seal.
Kalrez® 8575
DuPont