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Identification & Functionality
Kalrez® 9500 Features & Benefits
• Excellent resistance to ozone, ammonia, water vapor, etc.
• Low erosion rate and ultra-low particle generation in radical dominant oxygen and fluorine-based plasmas
• Excellent thermal stability
• Very low outgassing and metals content
• Excellent mechanical strength
Applications & Uses
• Gas inlet/orifice/mixing block seals
• Chamber lid seals
• Isolation valve seals
• Bonded gate valves/slit valve door seals
Properties
| Value | Units | Test Method / Conditions | |
| Modulus (at 100% Elongation) | 9.6 | MPa | ASTM D 412 |
| Tensile Strength | 16.4 | MPa | ASTM D 412 |
| Elongation (at Break) | 193 | % | ASTM D 412 |
| Hardness (Shore A) | 76 | - | ASTM D 2240 |
| Compression Set (O-Ring AS568-214, at 204°C, 70h) | 20 | % | ASTM D 1414 |
| Value | Units | Test Method / Conditions | |
| Maximum Service Temperature ¹ | 310 | °C | - |
| Value | Units | Test Method / Conditions | |
| Coefficient of Linear Thermal Expansion | 4.21 | E-4/°C | ISO 11359-1/-2 |
| Value | Units | Test Method / Conditions | |
| Density | 2.06 | g/cm³ | ISO 1183 |
- [1]: DuPont proprietary test method; useful temperature range may vary with seal design and application specifics
Technical Details & Test Data
Ozone is routinely used for processing in SACVD processes. It can attack the crosslinking structure of elastomeric seal materials causing a loss of sealing functionality (compression set resistance) to occur. The following table shows the compression set properties of Kalrez® 9500 versus Kalrez® 8085 after exposure to 7.4% ozone by volume for 10 hours @ 100°C (212°F). Kalrez® 9500 was largely unaffected and retained its sealing functionality better than Kalrez® 8085.
