Kalrez® 9600 perfluoroelastomer parts are designed for high purity, high temperature vacuum applications where seals are exposed to damaging Fluorine and Oxygen plasma radicals. In addition to its extremely low erosion rate and weight loss from plasma attack, this well balanced material provides excellent chemical resistance to Ammonia, Ozone, and Water Vapor. Its outstanding resilience in compression and ultra-low outgassing at high temperature conditions makes it especially suitable for applications where purity of the process environment is paramount, such as Plasma-Enhanced Atomic Layer Deposition and Chemical Vapor Deposition processes used in fabricating next generation semiconductor chips. A maximum application temperature of 315°C is suggested. Ultrapure cleaning and packaging are standard for all Kalrez® 9600 parts._x005F
Polymer Name: Perfluoroelastomer (FFKM)
Physical Form: Seals
Features: Good Erosion Resistance, Low Compression Set, Good Thermal Stability, Low Outgassing, Good Seal Force Retention
End Uses: Semiconductor Applications, Pump Parts
Color: Green
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Identification & Functionality
Chemical Family
Polymer Name
Technologies
Product Families
Kalrez® 9600 Features & Benefits
Product Highlights
• Exceptional thermal stability
• Outstanding erosion resistance to damaging Fluorine and Oxygen plasma radicals
• Ultra-low particle generation
• Excellent (low) compression set properties
• Superb seal force retention properties
• Ultra-low outgassing
• Increased tool uptime and yield
• Reduced total cost of ownership
Applications & Uses
Applications
Plastics & Elastomers End Uses
Use Recommendations
• Gas and plasma delivery system seals
• Reaction chamber seals
• Bonded gate and slit valve seals
• Pendulum and isolation valve seals
Properties
Mechanical Properties
| Value | Units | Test Method / Conditions | |
| Modulus (at 100% Elongation) | 4.8 | MPa | ASTM D 412 |
| Tensile Strength | 13.4 | MPa | ASTM D 412 |
| Elongation (at Break) | 218 | % | ASTM D 412 |
| Hardness (Shore A) | 70 | - | ASTM D 2240 |
| Compression Set (O-Ring AS568-214, at 204°C, 70h) | 15 | % | ASTM D 1414 |
Typical Properties
| Value | Units | Test Method / Conditions | |
| Maximum Service Temperature ¹ | 315 | °C | - |
Thermal Properties
| Value | Units | Test Method / Conditions | |
| Coefficient of Linear Thermal Expansion | 4.59 | E-4/°C | ISO 11359-1/-2 |
Other Properties
| Value | Units | Test Method / Conditions | |
| Density | 2.06 | g/cm³ | ISO 1183 |
Note
- [1]: DuPont proprietary test method; useful temperature range may vary with seal design and application specifics
Technical Details & Test Data
Sealing Performance
Sealing Performance After Exposure to Fluorine & Oxygen Plasma Radicals
Sealing Performance At High Temperatures
Kalrez® 9600
DuPont