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Kalrez® 9600

Sold by DuPont
Polymer Name: Perfluoroelastomer (FFKM)
Physical Form: Seals
Features: Good Erosion Resistance, Low Compression Set, Good Thermal Stability, Low Outgassing, Good Seal Force Retention
End Uses: Semiconductor Applications, Pump Parts
Color: Green
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Knowde Enhanced TDS

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Identification & Functionality

Chemical Family

Kalrez® 9600 Features & Benefits

Product Highlights

• Exceptional thermal stability

• Outstanding erosion resistance to damaging Fluorine and Oxygen plasma radicals

• Ultra-low particle generation

• Excellent (low) compression set properties

• Superb seal force retention properties

• Ultra-low outgassing

• Increased tool uptime and yield

• Reduced total cost of ownership

Applications & Uses


Physical Form
Mechanical Properties
ValueUnitsTest Method / Conditions
Modulus (at 100% Elongation)4.8MPaASTM D 412
Tensile Strength13.4MPaASTM D 412
Elongation (at Break)218%ASTM D 412
Hardness (Shore A)70-ASTM D 2240
Compression Set (O-Ring AS568-214, at 204°C, 70h)15%ASTM D 1414
Typical Properties
ValueUnitsTest Method / Conditions
Maximum Service Temperature ¹315°C-
Thermal Properties
ValueUnitsTest Method / Conditions
Coefficient of Linear Thermal Expansion4.59E-4/°CISO 11359-1/-2
Other Properties
ValueUnitsTest Method / Conditions
Density2.06g/cm³ISO 1183
  • [1]: DuPont proprietary test method; useful temperature range may vary with seal design and application specifics

Technical Details & Test Data

Sealing Performance

Sealing Performance After Exposure to Fluorine & Oxygen Plasma Radicals

DuPont Kalrez 9600 Sealing Performance - 1

Sealing Performance At High Temperatures

DuPont Kalrez 9600 Sealing Performance - 2

Kalrez® 9600