DuPont
Kalrez® 4079
Polymer Name: Perfluoroelastomer (FFKM)
Physical Form: Seals, Custom, Diaphragms, O-rings
Features: Good Mechanical Properties, High Temperature Resistance, Heat Aging Resistant, Low Compression Set, Good Thermal Stability, Chemical Resistant, General Purpose
End Uses: Semiconductor Applications, Pump Parts, Aircraft Applications
Color: Black
Kalrez® 4079 perfluoroelastomer parts are a low compression set product for general purpose use in O-rings, diaphragms, seals and other parts used in the chemical process and aircraft industries. It is a carbon black filled product with excellent chemical resistance, good mechanical properties, and outstanding hot air aging properties. It exhibits low swell in organic acids, inorganic acids and aldehydes, and has good response to temperature cycling effects. A maximum service temperature of 316°C (600°F) is suggested, with short excursions to higher temperatures possible. Kalrez® 4079 is not recommended for use in hot water/steam applications or in contact with certain hot aliphatic amines, ethylene oxide, or propylene oxide.
DuPont
Kalrez® Spectrum™ 7075
Applications: Other Packaging & Assembly Applications, Semiconductor Manufacturing, Equipment & Parts
Product Families: Parts & Shapes
Chemical Family: Fluoropolymers
Polymer Name: Perfluoroelastomer (FFKM)
End Uses: Semiconductor Applications, Valve Parts, Pump Parts
Kalrez® perfluoroelastomer parts are the material of choice for mechanical seals, valves, flanges and other demanding chemical and hydrocarbon processing applications. Kalrez® Spectrum™ 7075 has enhanced physical properties including very low compression set and improved seal force retention. It is a carbon black-filled product utilizing proprietary cure chemistry. Its mechanical properties are designed for improved sealing performance in both high temperature environments and temperature cycling situations. Kalrez® Spectrum™ 7075 O-rings have a glossy finish. This product was developed specifically for the chemical and hydrocarbon industries to provide improved chemical and thermal resistance better than the industry standard set by Kalrez® 4079.
DuPont
Kalrez® 9100
Polymer Name: Perfluoroelastomer (FFKM)
Physical Form: Seals
Features: Excellent Resistance To Plasma Radicals, Low Compression Set, Good Thermal Stability, Good Elastic Recovery, Low Outgassing, Low Metal Content, Good Mechanical Properties
End Uses: Semiconductor Applications, Pump Parts
Color: Amber
Kalrez® 9100 is an amber translucent product targeted specifically for PECVD, ALD, HDPCVD and Conductor (Poly/Metal) Etch applications*. Kalrez® 9100 has been specifically designed for low erosion and ultra-low particle generation in harsh plasma environments. It offers excellent thermal stability, very low outgassing as well as excellent elastic recovery and good mechanical strength properties and is well suited for both static and select dynamic sealing applications*. A maximum application temperature of 300°C (572°F) is suggested. Ultrapure post-cleaning and packaging is standard for allKalrez® 9100 parts.
DuPont
Kalrez® Spectrum™ 7375
Polymer Name: Perfluoroelastomer (FFKM)
Physical Form: Seals
Features: Good Compressive Strength, Good Mechanical Properties, Good Retention of Properties
End Uses: Semiconductor Applications, Pump Parts
Color: Black
Kalrez® Spectrum™ 7375 perfluoroelastomer parts are an innovative FFKM product based on a patented crosslinking system for chemical process industry applications where broad chemical and water/steam resistance are needed at elevated temperatures. Kalrez® Spectrum™ 7375 parts exhibit excellent compression set resistance, outstanding physical property retention, and good mechanical strength properties. A maximum application temperature of 300°C is suggested.
DuPont
Kalrez® 0090
Applications: Other Packaging & Assembly Applications, Semiconductor Manufacturing, Equipment & Parts
Product Families: Parts & Shapes
Chemical Family: Fluoropolymers
Polymer Name: Perfluoroelastomer (FFKM)
End Uses: Semiconductor Applications, Valve Parts, O Rings
Kalrez® 0090 perfluoroelastomer parts deliver durable, reliable sealing solutions for applications requiring excellent rapid gas decompression (RGD) properties as well as high hardness, high modulus properties, and excellent extrusion resistance (even without backup rings). Potential oil and gas applications include downhole equipment such as drilling and completion tools, as well as industrial equipment including pumps, valves and compressors. Kalrez® 0090 has been certified by two independent laboratories to meet rigorous requirements for resistance to RGD. In addition to demonstrated RGD resistance, Kalrez® 0090 seals provide superior performance in regard to chemical and temperature properties. Chemical resistance: Kalrez® 0090 is resistant to chemicals encountered in the oil and gas industry, including sour process streams containing H2S. Broad temperature capability: Kalrez® 0090 retains good physical properties up to temperatures as high as 250°C (482°F) and down to 21°C (5.8°F). Under pressurized conditions, in laboratory tests, Kalrez® 0090 has demonstrated low temperature performance down to 40°C (40°F).
DuPont
Kalrez® 9500
Polymer Name: Perfluoroelastomer (FFKM)
Physical Form: Seals
Features: Ozone Resistant, Good Thermal Stability, Low Outgassing, Low Metal Content, Good Mechanical Properties, Low Erosion
End Uses: Semiconductor Applications, Pump Parts
Color: Tan
Kalrez® 9500 perfluoroelastomer parts are a tan product targeted specifically for deposition processes where ozone, ammonia and water vapor are used for processing, e.g. SACVD, FCVD, PECVD curing processes, etc. It has been specifically designed for use in applications where the plasma environment is more chemical, i.e., where oxygen and fluorine radicals are more dominant.
DuPont
Vespel® SCP-5000
Polymer Name: Thermoplastic Polyimide (TPI), Polyimide (PI)
Physical Form: Rods, Isostatic Shapes, O-rings, Plaques, Sockets, Valve Seats, Bars
Features: High Stiffness, Good Machinability, High Temperature Resistance, High Modulus, High Hardness, Dimensional Stability, High Strength
End Uses: Semiconductor Applications, Pump Parts, Industrial Applications, Aerospace Applications
Tensile Strength: 163.0 - 163.0 MPa
Vespel® SCP-5000 is an unfilled polyimide polymer that offers high modulus and surface hardness and improved dimensional stability. Compared to traditional polyimides, it offers better strength and stiffness at high temperatures.
DuPont
Vespel® CP-0664
Physical Form: Custom
Features: Durable, Wear Resistant, Corrosion Resistant, Low Friction
End Uses: Semiconductor Applications, Pump Parts
DuPont is committed to maintaining the integrity of its Authentic Vespel® shapes and the high levels of product quality and service that our customers have come to expect and enjoy.
DuPont
Kalrez® Spectrum™ 7090
Polymer Name: Perfluoroelastomer (FFKM)
Physical Form: Seals
Features: High Modulus, Good Thermal Stability, High Hardness, Good Compressive Strength, Chemical Resistant, Good Mechanical Properties, Good Seal Force Retention
End Uses: Semiconductor Applications, Pump Parts
Color: Black
Kalrez® Spectrum™ 7090 perfluoroelastomer parts are specifically targeted for use in applications requiring high hardness/higher modulus properties. These specialty black parts have excellent mechanical properties including compression set resistance, seal force retention, response to temperature cycling effects and rapid gas decompression resistance. Kalrez® Spectrum™ 7090 perfluoroelastomer parts are well suited for both static and dynamic sealing applications, especially applications that require extrusion resistance at higher temperatures. They also offer outstanding thermal stability and chemical resistance. A maximum service temperature of 325°C (617°F) is suggested. Short excursions to higher temperatures may also be possible.
DuPont
Kalrez® 9600
Polymer Name: Perfluoroelastomer (FFKM)
Physical Form: Seals
Features: Good Erosion Resistance, Low Compression Set, Good Thermal Stability, Low Outgassing, Good Seal Force Retention
End Uses: Semiconductor Applications, Pump Parts
Color: Green
Kalrez® 9600 perfluoroelastomer parts are designed for high purity, high temperature vacuum applications where seals are exposed to damaging Fluorine and Oxygen plasma radicals. In addition to its extremely low erosion rate and weight loss from plasma attack, this well balanced material provides excellent chemical resistance to Ammonia, Ozone, and Water Vapor. Its outstanding resilience in compression and ultra-low outgassing at high temperature conditions makes it especially suitable for applications where purity of the process environment is paramount, such as Plasma-Enhanced Atomic Layer Deposition and Chemical Vapor Deposition processes used in fabricating next generation semiconductor chips. A maximum application temperature of 315°C is suggested. Ultrapure cleaning and packaging are standard for all Kalrez® 9600 parts._x005F
DuPont
Kalrez® Spectrum™ 7275
Polymer Name: Perfluoroelastomer (FFKM)
Physical Form: Seals
Features: Good Compressive Strength, Good Mechanical Properties, Good Retention of Properties
End Uses: Semiconductor Applications, Pump Parts
Color: Brown
Kalrez® Spectrum™ 7275 parts are a light brown product based on a proprietary crosslinking system targeted specifically for the chemical processing industry. It exhibits minimal swelling and improved retention of physical properties when exposed to aggressive chemicals, e.g., concentrated nitric acid, organosilanes, chlorosiloxanes, pure ethylene oxide, butyraldehyde, amines and vinyl and acrylic monomers. It also has excellent compression set resistance and good retention of physical properties after aging at high temperatures. A maximum service temperature of 300°C is suggested.
DuPont
Kalrez® 8085
Polymer Name: Perfluoroelastomer (FFKM)
Physical Form: Seals
Features: Good Mechanical Properties, Excellent Resistance To Plasma Radicals, Long Seal Life
End Uses: Semiconductor Applications, Pump Parts
Color: Beige
Kalrez® 8085 perfluoroelastomer parts are a beige, general purpose product for select etch, ash/strip and deposition processes. It has been formulated for minimal particle generation in NF3 plasma. Kalrez® 8085 exhibits very low particle generation and low weight loss in oxygen and fluorine-based plasmas, has excellent mechanical strength and is well-suited for both static and dynamic sealing applications (e.g., bonded slit valve doors, bonded gate valves, bonded pendulum valves, gas orifice seals, gas feedthrough seals, chamber lid seals, etc.) A maximum continuous service temperature of 240 °C is suggested. Kalrez® 8085 can also withstand short-term excursions to 275 °C. Ultrapure post-cleaning and packaging is standard for all Kalrez® 8085 parts.
DuPont
Vespel® SCP-5050
Polymer Name: Thermoplastic Polyimide (TPI), Polyimide (PI)
Physical Form: Rods, Bars
Features: High Temperature Strength, Impact Resistance, Wear Resistant, Durable
End Uses: Semiconductor Applications, Pump Parts
A shroud is a segmented ring with holes drilled radially outward for variable vane stems used inside a jet engine compressor. Some are split.
DuPont
Kalrez® 8002
Polymer Name: Perfluoroelastomer (FFKM)
Physical Form: Seals
Features: Low Compression Set, Excellent Plasma Cracking Resistance
End Uses: Semiconductor Applications, Pump Parts
Color: Transparent
Kalrez® 8002 perfluoroelastomer parts are a clear product for ash/strip applications. This unfilled product offers excellent plasma-cracking resistance and ultra-low particle generation in oxygen and fluorine-based plasmas versus mineral-filled products. Kalrez® 8002 exhibits excellent resistance to dry process chemistry, has good mechanical strength and is well suited for static, low stress/low sealing force and select bonded door seal applications. A maximum application temperature of 275°C (527°F) is suggested. Ultrapure post cleaning and packaging is standard for all Kalrez® 8002 parts.
DuPont
Kalrez® AeroSeal™ 7800
Polymer Name: Perfluoroelastomer (FFKM)
Physical Form: Seals
Features: High Thermo-Oxidative Stability, Good Thermal Stability, Good Compressive Strength, Low Corrosion, Good Mechanical Properties, Good Seal Force Retention
End Uses: Aerospace Applications, Semiconductor Applications, Pump Parts
Color: Black
Kalrez® AeroSeal® 7800* perfluoroelastomer parts are a specialty black product that meets the requirements of Aerospace Material Specification (AMS) 7257. It offers outstanding thermal stability and compression set resistance along with excellent seal force retention properties. It also offers excellent resistance to High Thermo-Oxidative Stability (HTS) gas turbine engine lubricating oils and has excellent response to temperature cycling effects._x005F Kalrez® AeroSeal® 7800 parts have good mechanical properties and are well suited for both static and dynamic sealing applications. A maximum temperature of 325°C (617°F) is suggested. Short excursions to higher temperatures may also be possible._x005F
DuPont
Vespel® SP-211
Polymer Name: Thermoplastic Polyimide (TPI), Polyimide (PI)
Physical Form: Rods, Bars, Tube, Plaques
Features: Good Thermal Stability
End Uses: Semiconductor Applications, Pump Parts
Vespel® SP-211 parts and shapes have a low coefficient of friction over a wide range of operating conditions. It exhibits low wear rates up to 300 °C (572 °F). SP-211 is a filled polymer.
DuPont
Kalrez® 9300
Polymer Name: Perfluoroelastomer (FFKM)
Physical Form: Seals
Features: Good Thermal Stability, Low Metal Content, Good Mechanical Properties, Low Erosion, Excellent Resistance To Plasma Radicals
End Uses: Semiconductor Applications, Pump Parts
Color: Brown
Kalrez® 9300 perfluoroelastomer parts are a brown product for Dielectric (Oxide) Etch applications. It has been specifically designed for use in applications where the plasma environment is a combination of ions (physical) and radicals (chemical), i.e., where a balance of physical and chemical plasma erosion resistance is typically required.
DuPont
Vespel® CP-0301
Physical Form: Seals
Features: Light Weight, High Strength
End Uses: Semiconductor Applications, Aircraft Applications, Pump Parts
Tensile Strength: 340.0 - 340.0 MPa
Vespel® CP-0301 composite parts from sheet molding compound consist of long, chopped fibers held in a polymer matrix. The discontinuous nature of the fibers allows the fibers to align with the contours of the part, permitting the molding of relatively complex shapes, while providing reinforcing strength. Vespel® CP-0301 parts demonstrate high strength and low weight for aircraft clamps and similar components.
DuPont
Kalrez® W240
Polymer Name: Perfluoroelastomer (FFKM)
Physical Form: Seals
Features: Low Metal Content, Good Mechanical Properties, Good Compression Set
End Uses: Semiconductor Applications, Pump Parts
Color: Black
Kalrez® W240 perfluoroelastomer parts are a black product for photovoltaic wet manufacturing processes requiring a wide range of chemical resistance. W240 provides an excellent combination of properties (resistance to acids/bases) and is the product of choice for wet processes as an upgrade from standard elastomers, i.e., FKM, NBR, EPDM, etc. A maximum service temperature of 230°C is suggested.
DuPont
Vespel® SP-1
Polymer Name: Thermoplastic Polyimide (TPI), Polyimide (PI)
Physical Form: Rods, Bars, Tube, O-rings, Plaques
Features: Good Machinability, Good Thermal Conductivity, Good Flexural Modulus, Dimensional Stability
End Uses: Semiconductor Applications, Pump Parts
Vespel® SP-1 parts and shapes are specified for their excellent physical properties, including electrical and thermal insulation at high temperatures. SP-1 is an unfilled polymer.
DuPont
Vespel® CR-6100
Physical Form: Rods, Tube, Plaques
End Uses: Semiconductor Applications, Pump Parts
Vespel® CR-6100 wear components are based on an advanced composite material consisting of a high performance Teflon® PFA fluorocarbon resin and oriented carbon fibers (PFA/CF Reinforced Composite, 20 wt% random x-y oriented carbon-fiber).
DuPont
Kalrez® 6375UP
Applications: Other Packaging & Assembly Applications, Semiconductor Manufacturing, Equipment & Parts
Product Families: Parts & Shapes
Chemical Family: Fluoropolymers
Polymer Name: Perfluoroelastomer (FFKM)
End Uses: Semiconductor Applications, Pump Parts, General Purpose
To transform raw semiconducting materials into a useful device requires hundreds of chemical processing steps. A significant number of these steps involve aggressive acids, solvents, and bases (including amines) used to clean, rinse, etch or strip unwanted materials and contaminants from the wafer surface. These chemicals can attack elastomeric seals causing them to swell and degrade or to leach undesirable metallic and ionic extractables that affect integrated circuit functionality.
DuPont
Vespel® SCP-50094
Polymer Name: Thermoplastic Polyimide (TPI), Polyimide (PI)
Physical Form: Rods, Bars
Features: Chemical Resistant, Good Toughness
End Uses: Semiconductor Applications, Pump Parts
Vespel®B SCP-50094 is a proprietary polymer. It is designed for demanding applications that require extensive toughness and chemical resistance.
DuPont
Kalrez® 8705
Polymer Name: Perfluoroelastomer (FFKM)
Physical Form: Seals
Features: Durable, Low Compression Set, Good Thermal Stability, UV Resistant, Low Metal Content, Good Seal Force Retention
End Uses: Semiconductor Applications, Pump Parts
Color: Black
Kalrez® 8705 perfluoroelastomer parts are primarily designed for seal locations in the direct path of high energy ultraviolet (UV) radiation emitted from a conventional light source or from plasma. They also provide excellent resistance to high concentrations of damaging oxygen free radicals, and outstanding sealing functionality in high temperature vacuum applications. Their extremely low sticking force makes them ideal for sealing quartz surfaces like quartz windows in UV cure chambers and quartz tubes in photoresist strip equipment, without leaving undesirable residues. A maximum application temperature of 310°C is suggested. Ultrapure cleaning and packaging is standard for all Kalrez® 8705 parts.
DuPont
Vespel® ASB-0826
Physical Form: Custom
End Uses: Pump Parts, Semiconductor Applications
Vespel® ASB-0826 and 3000 fabric-lined parts offer load-carrying capacity, while providing a self-lubricating surface. Fabrics combine the low friction properties of PTFE with other high-strength fibers for a durable liner that won't damage the mating surface.
DuPont
Kalrez® AeroSeal® 7797
Polymer Name: Perfluoroelastomer (FFKM)
Physical Form: Seals
Features: High Modulus, High Thermo-Oxidative Stability, Good Thermal Stability, Good Compressive Strength, High Hardness, Good Mechanical Properties, Good Seal Force Retention
End Uses: Semiconductor Applications, Pump Parts
Color: Black
Kalrez® AeroSeal® 7797 perfluoroelastomer parts are a specialty black product specifically targeted for use in applications requiring high hardness/higher modulus properties. It offers outstanding thermal stability and compression set resistance and has excellent seal force retention properties. It also offers excellent resistance to HTS (High Thermo-Oxidative Stability) gas turbine engine lubricating oils and has excellent response to temperature cycling effects. Kalrez® AeroSeal® 7797 has excellent mechanical properties and is well suited for both static and dynamic sealing applications. A maximum continuous service temperature of 325°C (617°F) is suggested. Short excursions to higher temperatures may also be possible.
DuPont
Vespel® CP-8000
Physical Form: Seals
Features: Good Toughness, Wear Resistant, Good Thermal Stability, Self Lubricating
End Uses: Semiconductor Applications, Bushings, Pump Parts
Vespel® CP-8000 series composite parts are made from fibers braided into hollow tubes held in a matrix of resins. This produces bushings that offer the best combination of properties for applications that require the benefits that a composite structure offers.
DuPont
Vespel® SP-22
Physical Form: Rods, Bars, Plaques
End Uses: Semiconductor Applications, Pump Parts
Vespel® SP-22 parts and shapes provide low wear and friction for bearings, thrust washers, and dynamic seals. SP-22 is a filled polymer with a coefficient of thermal expansion similar to aluminum.
DuPont
Vespel® ASB-3000
Physical Form: Custom
End Uses: Pump Parts, Semiconductor Applications
Vespel® 3000 fabric-lined parts offer load-carrying capacity, while providing a self-lubricating surface. Fabrics combine the low friction properties of PTFE with other high-strength fibers for a durable liner that won't damage the mating surface.