Products

Chemraz XRZ is a Perfluoroelastomer product. It is available in North America. Applications of Chemraz XRZ include engineering/industrial parts and sealing applications. Primary characteristic: high purity.

Chemraz E38 is a Perfluoroelastomer product. It is available in North America. Typical application: Sealing Applications.Characteristics include: Chemical Resistant Heat Resistant High Purity

Protection against oxygen-infused plasma is key in many etch chamber environments. These harsh environments often breakdown non-resistant materials, causing harmful particulation and, ultimately, defective chips.Greene, Tweed's Chemraz® XPE is highly resistant to O2 plasma and can be used in a wide range of applications, such as slit valve doors, reaction chamber lid seals, and gate valve seals. This advanced elastomeric material offers the semiconductor and solar industry an alternative to legacy products that quickly erode in the oxygen environment. With excellent resistance to both 02 and CF4 plasmas, this material affords an increased chip yield and maximized production. In addition, XPE seals provide customers with an increased MTBR (mean time between repair) to reduce downtime and maintenance costs.

Chemraz XCD is a Perfluoroelastomer product. It is available in North America. Applications of Chemraz XCD include engineering/industrial parts and sealing applications.Characteristics include: Heat Resistant High Purity

Chemraz SD585 is a Perfluoroelastomer product. It is available in North America. Applications of Chemraz SD585 include engineering/industrial parts, food contact applications, medical/healthcare and sealing applications. Primary characteristic: chemical resistant.

Specifically developed to meet the demands of aggressive dry plasma systems, Chemraz® 657 perfluoroelastomer's unique formulation provides enhanced plasma resistance and minimal contamination resulting in less downtime and higher wafer processing yields. Recommended primarily for both static and dynamic oxide etch wafer processing applications, Chemraz 657 remains stable at service temperatures up to 280°C (536°F) with excursions to 300°C (572°F).

Chemraz SD625 is a Perfluoroelastomer product. It is available in North America. Applications of Chemraz SD625 include medical/healthcare, engineering/industrial parts, food contact applications and sealing applications.Characteristics include: Chemical Resistant Heat Resistant High Purity

Chemraz 656 is a Perfluoroelastomer product. It is available in North America. Applications of Chemraz 656 include engineering/industrial parts and sealing applications.Characteristics include: High Purity Low Hardness

Chemraz 661 is a Perfluoroelastomer product filled with filler. It is available in North America. Applications of Chemraz 661 include engineering/industrial parts and sealing applications. Primary characteristic: chemical resistant.

Chemraz 667 is a Perfluoroelastomer product. It is available in North America. Applications of Chemraz 667 include engineering/industrial parts and sealing applications.Characteristics include: Heat Resistant Low Hardness

Chemraz XTR is a Perfluoroelastomer product. It is available in North America. Applications of Chemraz XTR include engineering/industrial parts and sealing applications.Characteristics include: Chemical Resistant Corrosion Resistant Heat Resistant

Greene, Tweed's Voraz™ 511, a perfluoroelastomer, combines good resistance to CVD and etch plasmas with low stiction to enhance process chamber efficiency and increase uptime in FPD and solar applications. Additionally, Greene, Tweed's proprietary (patent pending) Extenis® manufacturing process facilitates the creation of large seals such as those used in Gen 5+ slit valve doors and chamber lids. This unique combination of materials properties and design capability make Voraz 511 a highly engineered seal solution that is optimized to reduce the total cost of tool ownership for FPD and solar process equipment.