Products

Chemraz XRZ is a Perfluoroelastomer product. It is available in North America. Applications of Chemraz XRZ include engineering/industrial parts and sealing applications. Primary characteristic: high purity.

Greene FKM 938 is a Fluoroelastomer product. It is available in North America.

Chemraz E38 is a Perfluoroelastomer product. It is available in North America. Typical application: Sealing Applications.Characteristics include: Chemical Resistant Heat Resistant High Purity

Protection against oxygen-infused plasma is key in many etch chamber environments. These harsh environments often breakdown non-resistant materials, causing harmful particulation and, ultimately, defective chips.Greene, Tweed's Chemraz® XPE is highly resistant to O2 plasma and can be used in a wide range of applications, such as slit valve doors, reaction chamber lid seals, and gate valve seals. This advanced elastomeric material offers the semiconductor and solar industry an alternative to legacy products that quickly erode in the oxygen environment. With excellent resistance to both 02 and CF4 plasmas, this material affords an increased chip yield and maximized production. In addition, XPE seals provide customers with an increased MTBR (mean time between repair) to reduce downtime and maintenance costs.

Xyfluor® 860, a highly fluorinated elastomer compound, offers excellent chemical compatibility over a wide range of temperatures from -76°F to 450°F (-60°C to 232°C). Recommended for applications requiring a combination of low temperature properties and chemical resistance, Xyfluor's capabilities surpass those of standard fluoroelastomers, PTFE and graphite. Addtionally, Xyfluor reduces overall cost by extending equipment service life.

Chemraz XCD is a Perfluoroelastomer product. It is available in North America. Applications of Chemraz XCD include engineering/industrial parts and sealing applications.Characteristics include: Heat Resistant High Purity

Chemraz SD585 is a Perfluoroelastomer product. It is available in North America. Applications of Chemraz SD585 include engineering/industrial parts, food contact applications, medical/healthcare and sealing applications. Primary characteristic: chemical resistant.

Specifically developed to meet the demands of aggressive dry plasma systems, Chemraz® 657 perfluoroelastomer's unique formulation provides enhanced plasma resistance and minimal contamination resulting in less downtime and higher wafer processing yields. Recommended primarily for both static and dynamic oxide etch wafer processing applications, Chemraz 657 remains stable at service temperatures up to 280°C (536°F) with excursions to 300°C (572°F).

Greene FKM 731 is a Fluoroelastomer product. It is available in North America.

Chemraz SD625 is a Perfluoroelastomer product. It is available in North America. Applications of Chemraz SD625 include medical/healthcare, engineering/industrial parts, food contact applications and sealing applications.Characteristics include: Chemical Resistant Heat Resistant High Purity

Xyfluor® 870, a highly fluorinated elastomer compound, offers excellent chemical compatibility over a wide range of temperatures from -76°F to 450°F (-60°C to 232°C). Recommended for applications requiring a combination of low temperature properties and chemical resistance, Xyfluor 870 reduces overall cost by extending equipment service life.Xyfluor 870 parts can be made through high-volume injection-molding processing. Additionally, prototype parts are available for product testing.

Specifically designed for flat panel dsiplay CVD and dry plasma etch equipment where seal reliability and minimal contamination are essential, FPD Blue 707 fluoroelastomer provides excellent chemical compatibility and withstands a variety of aggressive chemicals. Available in an infinite range of geometries and cross sections, this material offers the diversity required for a variety of dynamic or static dry processing applications. FPD Blue 707 remains stable at service temperatures up to 220°C (428°F) and is ideally suited for large lid seals and bonded slit valve door seals.

Chemraz 656 is a Perfluoroelastomer product. It is available in North America. Applications of Chemraz 656 include engineering/industrial parts and sealing applications.Characteristics include: High Purity Low Hardness

Greene 409 is a Fluorosilicone (Fluoro Si) product. It is available in North America.

Greene FKM 927 is a Fluoroelastomer product. It is available in North America.

Greene FKM 761 is a Fluoroelastomer product. It is available in North America.

Chemraz XTR is a Perfluoroelastomer product. It is available in North America. Applications of Chemraz XTR include engineering/industrial parts and sealing applications.Characteristics include: Chemical Resistant Corrosion Resistant Heat Resistant

Fluoroelastomer 742 performs well in aggressive chemicals and where ultrapure materials are not required. Recommended for conventional wet and dry system applications, Fluoroelastomer 742 has a good field performance history in both dynamic and static applications. The mid-range durometer of this material allows the seal to conform to a wide range of hardware features.

Greene FKM 759 is a Fluoroelastomer product. It is available in North America. Applications of Greene FKM 759 include engineering/industrial parts and sealing applications. Primary characteristic: chemical resistant.

Greene FKM 926 is a Fluoroelastomer product. It is available in North America.

Greene 410 is a Fluorosilicone (Fluoro Si) product. It is available in North America.

Fluoroelastomer 931 performs well in aggressive chemicals and where ultrapure materials are not required. Recommended for conventional wet and dry applications, Fluoroelastomer 931 has a good field performance history in both dynamic and static applications. Fluoroelastomer 931 is excellent for high sealing load designs.

Greene FKM 772 is a Fluoroelastomer product. It is available in North America.

Chemraz 667 is a Perfluoroelastomer product. It is available in North America. Applications of Chemraz 667 include engineering/industrial parts and sealing applications.Characteristics include: Heat Resistant Low Hardness

Greene FKM 929 is a Fluoroelastomer product. It is available in North America.

Chemraz 661 is a Perfluoroelastomer product filled with filler. It is available in North America. Applications of Chemraz 661 include engineering/industrial parts and sealing applications. Primary characteristic: chemical resistant.

Fluoraz® 888 polytetrafluoroethylene/propylene (FEPM) performs will in aggressive chemicals where ultrapure materials are not required. Recommended for conventional wet and dry system applications requiring better chemical resistance than typical fluoroelastomers, Fluoraz 888 has a good field performance history in both dynamic and static applications. Fluoraz 888 remains stable at service temperatures up to 230°C (446°F).

Greene, Tweed's Voraz™ 511, a perfluoroelastomer, combines good resistance to CVD and etch plasmas with low stiction to enhance process chamber efficiency and increase uptime in FPD and solar applications. Additionally, Greene, Tweed's proprietary (patent pending) Extenis® manufacturing process facilitates the creation of large seals such as those used in Gen 5+ slit valve doors and chamber lids. This unique combination of materials properties and design capability make Voraz 511 a highly engineered seal solution that is optimized to reduce the total cost of tool ownership for FPD and solar process equipment.