- Ready to Use Product Type:Cleaner
- Application Areas:Equipment
- Compatible Substrates & Surfaces:Metal
- Features:Neutral pH, Excellent Rinsability, Water-based
Intelligent Fluids® Equipment Cleaner removes a wide range of organic contaminants in the semiconductor and display industry (e.g. Degas chamber cleaning, oven cleaning, general coater cleaning), it is even suitable for removing centimeter-thick photoresist layers from coater catch cups. The cleaning product is already effective at low and resource-saving process temperatures of 20-40°C and is characterized by excellent rinsability, making it a water-worthy and reliable substitute for solvents such as NMP, acetone or similar.