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Intelligent Fluids® Equipment Cleaner

1 of 3 products in this brand
Intelligent Fluids® Equipment Cleaner removes a wide range of organic contaminants in the semiconductor and display industry (e.g. Degas chamber cleaning, oven cleaning, general coater cleaning), it is even suitable for removing centimeter-thick photoresist layers from coater catch cups. The cleaning product is already effective at low and resource-saving process temperatures of 20-40°C and is characterized by excellent rinsability, making it a water-worthy and reliable substitute for solvents such as NMP, acetone or similar.

Product Type: Cleaner

Application Area: Equipment

Compatible Substrates & Surfaces: Metal

Features: Excellent Rinsability, Neutral pH, Water-based

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Identification & Functionality

Product Type

Features & Benefits

Features
  • Removes even centimeter-thick photoresist layers from coater catch cups
  • Resource-efficient process temperature of only 20-40°C
  • Excellent water-rinseability 
  • Strong and reliable replacement for solvents such as NMP, Acetone or similar

Applications & Uses

Markets
Application Area
Compatible Substrates & Surfaces

Properties

Physical Form
Properties
  • Water-based
  • Ph neutral
  • Non-inflammable
  • Non-toxic
  • Very high operator safety
  • Compatible to ultrasonic baths
  • Readily biodegradable