- Functions:Etchant
- Applicable Processes:Semiconductor Manufacturing
- Features:High Purity
Daikin Industries, Ltd. PFC-14 (CF4) is a high-purity gas designed for semiconductor manufacturing. With a purity level of 99.999 vol% (5N) or higher, it excels at etching SiO₂ and low-k films. Tailored for the electrical and electronics sector, specifically semiconductor manufacturing processes, it ensures optimal performance in parts and component fabrication.