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VORAZ

Greene Tweed Brand

Supplier:Greene Tweed
Products:1
Greene, Tweed's Voraz™ 511, a perfluoroelastomer, combines good resistance to CVD and etch plasmas with low stiction to enhance process chamber efficiency and increase uptime in FPD and solar applications. Additionally, Greene, Tweed's proprietary (patent pending) Extenis® manufacturing process facilitates the creation of large seals such as those used in Gen 5+ slit valve doors and chamber lids. This unique combination of materials properties and design capability make Voraz 511 a highly engineered seal solution that is optimized to reduce the total cost of tool ownership for FPD and solar process equipment.
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