Description Perlast® G70H provides optimal performance in high-temperature, chemically and mechanically demanding environments. This highly reinforced material offers extended seal life, offering low plasma etch rates in flat panel and thin-film solar CVD processes and the high mechanical strength needed to cope with the high forces repeatedly applied in these large scale applications.Perlast® G70H is available as fully molded O-rings (any size up to 2m/6.5ft internal diameter) and fully molded formed slit valve door seals up to 3m in length for generation 10 and above.Key Attributes Excellent plasma resistance High temperature performance High mechanical strength High abrasion resistance Extremely low out-gassing properties Typical Applications Slit valve door seals ISO valve seals Load lock seals NW / KF / ISO O-rings
Polymer Name: Perfluoroelastomer (FFKM)
Features: Abrasion Resistant, Chemical Resistant, Heat Resistance, High Strength, Low Outgassing