Daikin Industries, Ltd. Buffered Hydrogen Fluoride with Surface-active Agent (BHF-U) Acid 63U

Knowde Enhanced TDS

Identification & Functionality

Chemical Family: Inorganic Acids
Chemical Name: Hydrofluoric Acid
CAS No.: 7664-39-3
EC No.: 231-634-8
Technologies: Base Chemicals & Intermediates
Product Families: Base Chemicals & Intermediates — Technical Salts & Inorganics
Inorganic Acids

Features & Benefits

Product Highlights: Buffered Hydrofluoric Acid with Surfactant BHF-U Series are high quality etching agents in which the level of impurities, such as metal ions, have been greatly decreased for use in semiconductor manufacturing.

Like the BHF series, the etching rate and selectivity can be controlled by the mixing ratio of hydrofluoric acid and ammonium fluoride.

Addition of surfactant improves wettability, suppresses Poly-Si etching, reduces particle adhesion on the wafer, and prevents Si surface roughness.

Applications & Uses

Markets: Electrical & Electronics
Applications: Electrical & Electronics — Parts & Components
Semiconductor Manufacturing
Applicable Processes: Semiconductor Manufacturing

Properties

	Value	Units	Test Method / Conditions
HF Concentration Mass	Varies by mixture ratio	—	—
NHAF Concentration Mass	Varies by mixture ratio	—	—

Technical Details & Test Data

Inspection Items: Anionic impurities(Cl, NO3, PO4, SO4)

Metal impurities(Fe, Na, K, etc., more than 20 metals)

Particles

Safety & Health

Handling Method / Safety Information: Be sure to read the Safety Data Sheet (SDS) and precautions on the label before using.

This product has been developed for industrial purposes and we shall not guarantee the the safety if used for any other purposes. If it is going to be used for medical or food applications, please contact us in advice.

Packaging & Availability