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Daikin Industries, Ltd. PFC-116 (C2F6)

Daikin Industries, Ltd. PFC-116 (C2F6) is a high-purity gas specifically formulated for semiconductor manufacturing. With an impressive purity level of 99.999 vol% (5N) or higher, it is aptly suited for cleaning applications within the semiconductor manufacturing process. This product caters to the electrical and electronics sectors, focusing on part and component fabrication.

Functions: Etchant

Applicable Processes: Semiconductor Manufacturing

Features: High Purity

    Knowde Enhanced TDS

    Identification & Functionality

    Chemical Name
    Industrial Additives Functions
    CAS No.
    76-16-4
    EC No.
    200-939-8
    Chemical Formula

    C₂F₆

    Features & Benefits

    Labeling Claims
    Industrial Additives Features
    Product Highlights
    • Purity is 99.999vol% (5N) or more for semiconductor manufacturing.
    • Suitable for cleaning applications mainly in the semiconductor manufacturing process.

    Applications & Uses

    Applicable Processes

    Properties

    Physical Form
    Physical Properties
    ValueUnitsTest Method / Conditions
    Boiling Point-78.2°C
    Molecular Weight138.01
    Vapor Pressure (at 19.65°C)2.981MPa

    Technical Details & Test Data

    Inspection Items

    Purity (excluding air content), other fluorocarbons, acid content, moisture, air content

    Safety & Health

    Handling Method / Safety Information
    • Be sure to read the Safety Data Sheet (SDS) and precautions on the label before using.
    • This product has been developed for industrial purposes and we shall not guarantee the the safety if used for any other purposes. If it is going to be used for medical or food applications, please contact us in advice.

    Packaging & Availability

    Packing Specification

    10L container, 47L container, etc