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Daikin Industries, Ltd. PFC-C318 (C4F8)

Daikin Industries, Ltd. PFC-C318 (C4F8) is a high-purity gas tailored for semiconductor manufacturing. With a purity level of 99.99 vol% (4N) or greater, it excels at etching SiO₂ and low-k films. Additionally, it's apt for the Bosch process, particularly in side wall protection, serving the electrical and electronics industry for parts and component fabrication.

Functions: Etchant

Applicable Processes: Semiconductor Manufacturing

    Knowde Enhanced TDS

    Identification & Functionality

    Industrial Additives Functions
    CAS No.
    115-25-3
    EC No.
    204-075-2
    Chemical Formula

    C₄F₈

    Features & Benefits

    Labeling Claims
    Product Highlights
    • Purity is 99.99vol% (4N) or more for semiconductor manufacturing.
    • Mainly suitable for etching SiO2 and low-k films.
    • Suitable for Bosch process side wall protection.

    Applications & Uses

    Applicable Processes

    Properties

    Physical Form
    Physical Properties
    ValueUnitsTest Method / Conditions
    Boiling Point-5.85°C
    Molecular Weight200.01
    Vapor Pressure (at 20°C)0.266MPa

    Technical Details & Test Data

    Inspection Items

    Purity (excluding air content), other fluorocarbons, acid content, moisture, air content.

    Safety & Health

    Handling Method / Safety Information
    • Be sure to read the Safety Data Sheet (SDS) and precautions on the label before using.
    • This product has been developed for industrial purposes and we shall not guarantee the the safety if used for any other purposes. If it is going to be used for medical or food applications, please contact us in advice.

    Packaging & Availability

    Packing Specification

    10L container, 47L container, etc.