- Functions:Catalyst
- Applicable Processes:Gas Purification
Guild Associates Perfluorocarbon Catalyst PFC-200 is catalyst capable of destroying perfluorocarbons and hydrofluorocarbons such as sulfur hexafluoride (SF6), trifluoromethane (CHF3), carbon tetrafluoromethane (CF4, R-14) octafluoropropane (C3F8) perfluorocyclobutane (C4F8), nitrogen trifluoride (NF3), with minimal formation of NOx. Catalyst is suited for application in abatement of semiconductor waste gasses and metals smelting gasses.