Knowde Enhanced TDS
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Technical Details & Test Data
- Destruction Curves for Selected Fluorine-containing Compounds
The graph to the left displays the destruction curves for various fluorine-containing compounds vs catalyst temperature for PFC-200. The compounds are commonly used in many industries, including semiconductor manufacturing. The key advantage for the PFC-200 is that the catalyst framework material is much more tolerant of hydrofluoric acid than conventional catalysts. So not only does the PFC-200 function at significantly lower temperatures, it has an expected lifetime that is far superior to any other conventional catalyst.