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Semitron® MPR-1000
  • Polymer Name:Polyamide-imide (PAI)
  • Physical Form:Plates, Rods
  • Features:Very Good Heat Resistance, High Tolerance, High Durability, Chipping Resistance, Low Outgassing, Good Machinability
  • Density:1470.0 - 1470.0 kg/m³
  • Tensile Modulus:6050.0 - 6050.0 MPa
  • Color:Yellow, Brown
Semitron® MPR 1000 - an advanced engineering material that is specially developed for use in the semiconductor and electronics industry. This material boasts excellent heat resistance and low erosion rates in plasma chambers, making it a top choice for vacuum chamber applications such as etch, CVD, and ion implant.Features:Longevity: Increased life in plasma chambers (up to 25X over polyimide in ozone)Clean: Low ionic metal content and low out-gassingValue: Lower overall cost in use compared to traditional materials used in vacuum chamber applications such as quartz, ceramics, and engineering plasticsBenefits:Long-lasting performance in plasma-based vacuum chambersLow maintenance and cost-effective solutionClean and efficient, suitable for semiconductor and electronics industryApplications:Clamp ringsTrench ringsScrewsPinsShower headsCentering pinsFocus ringsInsulatorsVacuum padsWafer guidesSemitron® MPR 1000 is a versatile material that is ideal for use in vacuum chamber applications within the semiconductor and electronics industry. With its outstanding heat resistance and low erosion rates, this material is a cost-effective and efficient solution that ensures longevity and clean performance in plasma-based vacuum chambers.