Products

A translucent beige compound with semi-crystalline perfluoropolymer nano-filler, specially developed to meet the demands of the semiconductor and bio-analytical industries. Compatible with fluorine based chemistries and universally suitable for both wet and dry semiconductor processes including Lithography, Plasma, PVD, CVD, Etch, Stripping and Cleaning.Perlast® G74P combines a fully fluorinated polymer backbone, a fully fluorinated nano-filler system (no inorganic fillers) and a highly fluorinated cross-linking process, which results in a perfluoroelastomer with unrivaled purity, chemical resistance and mechanical properties.Perlast® G74P exhibits extremely low out-gassing properties, making it ideal for use in vacuum applications.Key Attributes Exceptionally pure - does not contain any inorganic fillers which may cause particulation problems. Excellent chemical and temperature resistance. Excellent mechanical properties. Extremely low out-gassing properties making it ideal for vacuum sealing applications. High material compliance reduces surface permeation. Reduced first wafer effect. Lower cost of ownership. Typical Applications Dynamic seals Static seals Wafer-handling products

A translucent beige compound with semi-crystalline perfluoropolymer nano-filler, specially developed to meet the demands of the semiconductor and bio-analytical industries. Compatible with fluorine based chemistries and universally suitable for both wet and dry semiconductor processes including Lithography, Plasma, PVD, CVD, Etch, Stripping and Cleaning.Perlast® G67P combines a fully fluorinated polymer backbone, a fully fluorinated nano-filler system (no inorganic fillers) and a highly fluorinated cross-linking process, which results in a perfluoroelastomer with unrivaled purity and chemical resistance.Perlast® G67P has a significantly lower compressive modulus than traditional perfluoroelastomers, making it highly compliant. So for a given compression, it exhibits a low reaction force, this results in lower stress on the seal, which leads to longer life expectancy.Key Attributes Exceptionally pure - does not contain any inorganic fillers which may cause particulation problems. Excellent chemical and temperature resistance. Excellent mechanical properties. Extremely low out-gassing properties making it ideal for vacuum sealing applications. High sealing efficiency. High material compliance reduces surface permeation. Reduced first wafer effect. Lower cost of ownership. Typical Applications Dynamic seals Static seals Wafer-handling products

S80U is a high transparency grade of silicone rubber intended for use in food, dairy, brewing, potable water, pharmaceutical and biomedical applications. Platinum-cured silicone is odorless, tasteless and non toxic. Seals made from S80U are resistant to repeated sterilizing, autoclaving and cleaning agents commonly used in these industries.Unlike traditional peroxide-cure methods, platinum curing results in a smooth contact surface finish and a high degree of purity. No residue substances such as benzoic acid, peroxides, ketones are produced during manufacturing, which can be transferred from the seal to critical hygienic products.Key Attributes FDA compliant - extraction tested to CFR 21 § 177.2600(e,f) USP Class VI <88> and USP <87> compliant 3A Sanitary Standard 18-03 Class 1 compliant. Formulated to BS2494 Type ‘W' and (Water Regulations Advisory Scheme WRAS - formerly Water Research Council WRC) in accordance with BS6920. Approval No. 0005509. BGV XV compliant. Good mechanical and physical properties Chemically stable over a temperature range of -60°C to +200°C. Withstands sterilizing and autoclaving procedures Free from Animal Derived Ingredients (ADI) Typical Applications Food processing and packaging equipment Pharmaceutical and biomedical apparatus Hygienic seals in dairy equipment Potable and high-purity water applications

A dark brown high performance polymer containing a unique self- reinforcing polymer structure, developed specifically for critical semiconductor applications. The high purity of the polymer combined with the absence of any fillers makes this polymer suitable for processes involving lower feature sizes. This material has a low coefficient of thermal expansion, low compression set and has an extremely low etch rate in aggressive plasma environments.Key Attributes Exceptionally pure - does not contain any fillers which may cause particulation problems. Outstanding plasma resistance - ideal for Chlorine, Fluorine & Oxygen chemistries. Exceptionally low plasma etch rate Low thermal expansion Retro-fits existing O-ring grooves (including FKM & FFKM grooves) Low permeation Low out-gassing Low adhesion (reduced sticking) Low friction, high strength and high modulus make K13X ideal for constant force dynamic applications. Typical Applications Dynamic seals Static seals Wafer-handling products

A visibly clear and highly reinforced perfluoroelastomer, combining ultra- high purity with excellent mechanical properties. Developed for use in advanced wet and dry semiconductor processes down to the 45nm node and beyond, this material has ultra-low out-gassing properties, high temperature stability and excellent plasma resistance to provide effective sealing in extreme conditions.Perlast® G100XT combines a fully fluorinated polymer backbone with a highly fluorinated cross-linking system to provide a material with exceptional resistance to high temperature and aggressive semiconductor processes. The fully organic structure of the material helps to eliminate particles and reduce cost of ownership. The superior chemical performance of the material is enhanced by exceptionally low compression set, high elongation and ultimate tensile strength.Perlast® G100XT has a low modulus, giving it a very high sealing efficiency. The material is highly resistant to stress induced chemical attack in constant compression or constant strain environments, leading to longer service life and reliable sealing performance.Key Attributes Exceptionally pure - does not contain any inorganic fillers which may cause particulation problems. High temperature stability Exceptionally low compression set Excellent mechanical properties Ultra low out-gassing High sealing efficiency Reduced Cost of Ownership (CoO) Typical Applications Static Seals Wafer Handling Products

A red/brown high performance polymer containing a unique self- reinforcing polymer structure, developed specifically for aggressive semiconductor applications. The high purity of the polymer combined with the absence of any fillers makes this polymer suitable for processes involving lower feature sizes. This material has a low coefficient of thermal expansion, low compression set and has an extremely low etch rate in aggressive plasma environments.Key Attributes Exceptionally pure - does not contain any fillers which may cause particulation problems. Outstanding plasma resistance - ideal for Chlorine, Fluorine & Oxygen chemistries. Exceptionally low plasma etch rate Low thermal expansion Retro-fits existing O-ring grooves (including FKM & FFKM grooves) Low permeation Low out-gassing Low adhesion (reduced sticking) Typical Applications Dynamic seals Static seals Wafer-handling products

A brown colored high performance polymer containing a unique self- reinforcing polymer structure, developed specifically for aggressive semiconductor applications. The high purity of the polymer combined with the absence of any fillers makes this polymer suitable for processes involving lower feature sizes. This material has a low coefficient of thermal expansion, low compression set and has an extremely low etch rate in aggressive plasma environments.Kimura® K23X can be fully molded into custom shapes and O-rings (from 6.07mm/0.24" ID & 1.78mm/0.07" CS up to 600mm/23.6" ID & 10mm/0.39" CS).Key Attributes Exceptionally pure - does not contain any fillers which may cause particulation problems. Low modulus ensures excellent sealing characteristics Outstanding plasma resistance - ideal for Chlorine, Fluorine & Oxygen chemistries. Exceptionally low plasma etch rate Low thermal expansion Retro-fits existing O-ring grooves (including FKM & FFKM grooves) Low permeation Low out-gassing Low adhesion (reduced sticking) Typical Applications Dynamic seals Static seals Wafer-handling products

S71U is a high transparency grade of silicone rubber intended for use in food, dairy, brewing, potable water, pharmaceutical and biomedical applications. Platinum-cured silicone is odorless, tasteless and non toxic. Seals made from S71U are resistant to repeated sterilizing, autoclaving and cleaning agents commonly used in these industries.Unlike traditional peroxide-cure methods, platinum curing results in a smooth contact surface finish and a high degree of purity. No residue substances such as benzoic acid, peroxides, ketones are produced during manufacturing, which can be transferred from the seal to critical hygienic products.Key Attributes Compliant with FDA FDA CFR210177.2600 for use with dry, aqueous and fatty food stuffs. Conforms to USP class VI suffix 87 and 88, Biological Reactivity tests. Good mechanical and physical properties Chemically stable over a temperature range of -60°C to +200°C. Withstands sterilizing and autoclaving procedures Free from Animal Derived Ingredients (ADI) Typical Applications Food processing and packaging equipment Pharmaceutical and biomedical apparatus Hygienic seals in dairy equipment Potable and high-purity water applications

A translucent brown fluoropolymer compound reinforced with semi- crystalline perfluoropolymer nano-particles, specially developed to meet the demands of the semiconductor industry.Nanofluor® Y75N combines a fully fluorinated nano-filler system which significantly reduces gas permeability. The absence of metallic or carbon-based fillers produces an exceptionally pure, translucent elastomer that is less prone to chemical attack with the benefit of reduced swelling following exposure to aggressive media.Nanofluor® Y75N is a truly novel material which bridges the gap between fluorocarbons (FKM) and perfluoroelastomers (FFKM). Its high fluorine content provides unrivaled purity, excellent high temperature capability and very good chemical resistance. Nanofluor® Y75N is a cost effective upgrade from FKM and fluorosilicone in many semiconductor applications.Key Attributes Good all round chemical and temperature resistance. Outstanding mechanical properties. Exceptional oxygen plasma resistance. Exceptionally pure - does not contain any inorganic fillers or metal oxides which cause particulation problems. Extremely low permeability and out-gassing properties making it ideal for vacuum sealing applications. High sealing conformity reduces surface permeation. Typical ApplicationsDesigned for use in semiconductor applications, including: NW and KF flange fittings Dry plasma etch Wet etch (acid based) Dry ashing Oxidation/diffusion Lithography Static seals: O-rings, body seals, cathode seals Gaskets