A translucent brown fluoropolymer compound reinforced with semi- crystalline perfluoropolymer nano-particles, specially developed to meet the demands of the semiconductor industry.Nanofluor® Y75N combines a fully fluorinated nano-filler system which significantly reduces gas permeability. The absence of metallic or carbon-based fillers produces an exceptionally pure, translucent elastomer that is less prone to chemical attack with the benefit of reduced swelling following exposure to aggressive media.Nanofluor® Y75N is a truly novel material which bridges the gap between fluorocarbons (FKM) and perfluoroelastomers (FFKM). Its high fluorine content provides unrivaled purity, excellent high temperature capability and very good chemical resistance. Nanofluor® Y75N is a cost effective upgrade from FKM and fluorosilicone in many semiconductor applications.Key Attributes Good all round chemical and temperature resistance. Outstanding mechanical properties. Exceptional oxygen plasma resistance. Exceptionally pure - does not contain any inorganic fillers or metal oxides which cause particulation problems. Extremely low permeability and out-gassing properties making it ideal for vacuum sealing applications. High sealing conformity reduces surface permeation. Typical ApplicationsDesigned for use in semiconductor applications, including: NW and KF flange fittings Dry plasma etch Wet etch (acid based) Dry ashing Oxidation/diffusion Lithography Static seals: O-rings, body seals, cathode seals Gaskets
Polymer Name: Fluoroelastomer (FKM)
Features: Chemical Resistant, High Purity, Low Outgassing, Thermal Shock Resistant
