- Functions:Precursor
- Chemical Family:Silanes
- Applicable Processes:Semiconductor Manufacturing
- Features:Low Chloride Content, High Purity
- Synonyms:Methyltriethoxysilane, Monomethyltriethoxysilane, NSC 5226, Triethoxymethylsilane, Triethoxysilylmethane
SEMICOSIL® M3E is a high-purity methyltriethoxysilane (M3E) known for its excellent purity, low metal content, and low chloride content. This product has been specifically developed for the semiconductor industry, serving as a precursor for low dielectric constant interlayer dielectrics and other applications.