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    Perlast® G100XT banner
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    Precision Polymer EngineeringPerlast® G100XT
    • Polymer Name:Perfluoroelastomer (FFKM)
    • Features:Heat Resistance, High Elongation, High Purity, Good Thermal Stability, High Tensile Strength, Low Outgassing, Low Compression Set
    A visibly clear and highly reinforced perfluoroelastomer, combining ultra- high purity with excellent mechanical properties. Developed for use in advanced wet and dry semiconductor processes down to the 45nm node and beyond, this material has ultra-low out-gassing properties, high temperature stability and excellent plasma resistance to provide effective sealing in extreme conditions.Perlast® G100XT combines a fully fluorinated polymer backbone with a highly fluorinated cross-linking system to provide a material with exceptional resistance to high temperature and aggressive semiconductor processes. The fully organic structure of the material helps to eliminate particles and reduce cost of ownership. The superior chemical performance of the material is enhanced by exceptionally low compression set, high elongation and ultimate tensile strength.Perlast® G100XT has a low modulus, giving it a very high sealing efficiency. The material is highly resistant to stress induced chemical attack in constant compression or constant strain environments, leading to longer service life and reliable sealing performance.Key Attributes Exceptionally pure - does not contain any inorganic fillers which may cause particulation problems. High temperature stability Exceptionally low compression set Excellent mechanical properties Ultra low out-gassing High sealing efficiency Reduced Cost of Ownership (CoO) Typical Applications Static Seals Wafer Handling Products
    Nanofluor® Y75N banner
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    Precision Polymer EngineeringNanofluor® Y75N
    • Polymer Name:Fluoroelastomer (FKM)
    • Features:High Purity, Low Outgassing, Chemical Resistant, Thermal Shock Resistant
    A translucent brown fluoropolymer compound reinforced with semi- crystalline perfluoropolymer nano-particles, specially developed to meet the demands of the semiconductor industry.Nanofluor® Y75N combines a fully fluorinated nano-filler system which significantly reduces gas permeability. The absence of metallic or carbon-based fillers produces an exceptionally pure, translucent elastomer that is less prone to chemical attack with the benefit of reduced swelling following exposure to aggressive media.Nanofluor® Y75N is a truly novel material which bridges the gap between fluorocarbons (FKM) and perfluoroelastomers (FFKM). Its high fluorine content provides unrivaled purity, excellent high temperature capability and very good chemical resistance. Nanofluor® Y75N is a cost effective upgrade from FKM and fluorosilicone in many semiconductor applications.Key Attributes Good all round chemical and temperature resistance. Outstanding mechanical properties. Exceptional oxygen plasma resistance. Exceptionally pure - does not contain any inorganic fillers or metal oxides which cause particulation problems. Extremely low permeability and out-gassing properties making it ideal for vacuum sealing applications. High sealing conformity reduces surface permeation. Typical ApplicationsDesigned for use in semiconductor applications, including: NW and KF flange fittings Dry plasma etch Wet etch (acid based) Dry ashing Oxidation/diffusion Lithography Static seals: O-rings, body seals, cathode seals Gaskets

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