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Nanofluor

Precision Polymer Engineering Brand

Products:1
Nanofluor® elastomers can be considered as hybrid materials, bridging a gap between the low cost of fluoroelastomer (FKM) and high cost of perfluoroelastomer (FFKM) polymer types. The range includes a fully organic ultra-low outgassing material and an inorganic filled grade with unique nano-filler to reduce erosion rates. The nano-filled material provides a chemical inertness only seen in much more costly FFKM grades and been developed for plasma ash or resist strip, chlorine and CxFy based etch processes. Nanofluor® grades provide some of the lowest trace metal contamination levels available from elastomer seals and ultra-low permeation rates.
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Nanofluor® Y75N banner
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Nanofluor® Y75N
  • Polymer Name:Fluoroelastomer (FKM)
  • Features:High Purity, Low Outgassing, Chemical Resistant, Thermal Shock Resistant
A translucent brown fluoropolymer compound reinforced with semi- crystalline perfluoropolymer nano-particles, specially developed to meet the demands of the semiconductor industry.Nanofluor® Y75N combines a fully fluorinated nano-filler system which significantly reduces gas permeability. The absence of metallic or carbon-based fillers produces an exceptionally pure, translucent elastomer that is less prone to chemical attack with the benefit of reduced swelling following exposure to aggressive media.Nanofluor® Y75N is a truly novel material which bridges the gap between fluorocarbons (FKM) and perfluoroelastomers (FFKM). Its high fluorine content provides unrivaled purity, excellent high temperature capability and very good chemical resistance. Nanofluor® Y75N is a cost effective upgrade from FKM and fluorosilicone in many semiconductor applications.Key Attributes Good all round chemical and temperature resistance. Outstanding mechanical properties. Exceptional oxygen plasma resistance. Exceptionally pure - does not contain any inorganic fillers or metal oxides which cause particulation problems. Extremely low permeability and out-gassing properties making it ideal for vacuum sealing applications. High sealing conformity reduces surface permeation. Typical ApplicationsDesigned for use in semiconductor applications, including: NW and KF flange fittings Dry plasma etch Wet etch (acid based) Dry ashing Oxidation/diffusion Lithography Static seals: O-rings, body seals, cathode seals Gaskets
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