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SEMICOSIL® 4MS-EL

1 of 27 products in this brand
SEMICOSIL® 4MS-EL is a high-purity silane compound specifically developed for the semiconductor industry. It is used as a precursor for low-dielectric-constant interlayer dielectrics in applications such as chemical vapor deposition (CVD) and spin-on dielectrics (SOD). This product is known for its high purity, low metal content, and low chloride content, ensuring optimal performance in semiconductor processes.

Functions: Precursor

Chemical Family: Silanes

Applicable Processes: Semiconductor Manufacturing

Knowde Enhanced TDS

Identification & Functionality

Chemical Family
Industrial Additives Functions
EC No.
236-704-1
CAS No.
13465-77-5

Features & Benefits

Applications & Uses

Applicable Processes

Properties

Physical Form
Appearance
Clear colorless liquid
Odor
Characteristic odor
Soluble in
Organic solvents 
Typical Properties
ValueUnitsTest Method / Conditions
Assaymin. 99.9 %
Boiling Point (at 1013 hPa)26°C
Density (at 20°C)0.65g/cm³DIN 51757
Flash Point-20°CDIN 51755
HClmin. 15.0ppm
Melting Point-95°C
Refractive Index1.359

Regulatory & Compliance

Packaging & Availability

Country Availability
Regional Availability
  • Africa
  • Asia
  • Europe
  • Latin America
  • North America
  • Oceania