Knowde Enhanced TDS
Identification & Functionality
- Chemical Family
- Chemical Name
- Industrial Additives Functions
- Molecular formula
- Cl₆Si₂
- EC No.
- 236-704-1
- CAS No.
- 13465-77-5
- Technologies
Features & Benefits
- Labeling Claims
Applications & Uses
- Markets
- Applicable Processes
- Application Details
SEMICOSIL 6C2S was developed for the semiconductor industry, e.g. as precursor for low temperature deposition processes.
Properties
- Physical Form
- Appearance
- Colorless clear liquid
- Soluble in
- Organic solvents
- Typical Properties
- Properties
- Ultra high purity
- Low metal content
Value | Units | Test Method / Conditions | |
Boiling Point | 145 | °C | — |
Molecular Weight | 269 | — | — |
Density (at 25°C) | 1.56 | g/cm³ | — |
Hexachlorodisilane | min. 99.5 | % | — |
Hexachlorodisiloxane | max. 0.05 | % | — |
Melting Point | -1 | °C | — |
Metallic Impurities Individual | max. 15.0 | ppb | — |
Metallic Impurities Total | max. 100.0 | ppb | — |
Tetrachlorosilane | max. 0.2 | % | — |
Regulatory & Compliance
- Certifications & Compliance
Packaging & Availability
- Country Availability
- Regional Availability