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SEMICOSIL® HMDSO-EL

SEMICOSIL® HMDSO-EL is a high-purity hexamethyldisiloxane (HMDSO) known for its exceptional purity, low metal content, and low chloride content. This product has been specifically developed to cater to the needs of the semiconductor industry. It finds applications in various processes such as chemical vapor deposition (CVD) and spin-on dielectrics (SOD).

Brand: SEMICOSIL (27 products)

Chemical Family: Silicones

Applicable Processes: Semiconductor Manufacturing

Features: Low Chloride Content, Low Metal Content

Synonyms: Bis(trimethylsilyl)ether, Bis(trimethylsilyl)oxide, Oxybis(trimethylsilane)

Technical Data Sheet

Enhanced TDS

Knowde-enriched technical product data sheet

Identification & Functionality

Chemical Family
Chemical Name
CAS No.
107-46-0
Molecular formula
C₆H₁₈Si₂O
EC No.
203-492-7
Technologies
Product Families

Features & Benefits

Labeling Claims
Industrial Additives Features

Applications & Uses

Markets
Applications
Applicable Processes
Application Details

SEMICOSIL® HMDSO-EL was developed for applications in the semiconductor industry.

Properties

Physical Form
Typical Properties
ValueUnitsTest Method / Conditions
Boiling Point (at 1013 hPa)100°C-
Molecular Weight162g/mol-
Density (at 25°C)approx. 0.76 g/cm³DIN 51757
Flash Point-6°CDIN 51755
Melting Point-68°C-
Properties
  • High purity
  • Low metal content
  • Low chloride content

Regulatory & Compliance

Packaging & Availability

Country Availability
Regional Availability
  • Africa
  • Asia
  • Europe
  • Latin America
  • North America
  • Oceania